The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2014

Filed:

Sep. 18, 2011
Applicants:

Masako Ogata, Aomori-ken, JP;

Ikuo Fujiwara, Kanagawa-ken, JP;

Hiroto Honda, Kanagawa-ken, JP;

Kazuhiro Suzuki, Tokyo, JP;

Honam Kwon, Kanagawa-ken, JP;

Risako Ueno, Tokyo, JP;

Hitoshi Yagi, Kanagawa-ken, JP;

Masaki Atsuta, Kanagawa-ken, JP;

Koichi Ishii, Kanagawa-ken, JP;

Keita Sasaki, Kanagawa-ken, JP;

Hideyuki Funaki, Tokyo, JP;

Inventors:

Masako Ogata, Aomori-ken, JP;

Ikuo Fujiwara, Kanagawa-ken, JP;

Hiroto Honda, Kanagawa-ken, JP;

Kazuhiro Suzuki, Tokyo, JP;

Honam Kwon, Kanagawa-ken, JP;

Risako Ueno, Tokyo, JP;

Hitoshi Yagi, Kanagawa-ken, JP;

Masaki Atsuta, Kanagawa-ken, JP;

Koichi Ishii, Kanagawa-ken, JP;

Keita Sasaki, Kanagawa-ken, JP;

Hideyuki Funaki, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
Abstract

An uncooled infrared imaging element includes a pixel region, a device region, and a support substrate. The pixel region includes heat-sensitive pixels. The heat-sensitive pixels are arranged in a matrix and change current-voltage characteristics thereof in accordance with receiving amounts of infrared. The device region includes at least one of a drive circuit and a readout circuit which includes a MOS transistor. The drive circuit drives the heat-sensitive pixels. The readout circuit detects signals of the heat-sensitive pixels. The support substrate is provided with a cavity region to be under pixel region and the MOS transistor.


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