The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2014
Filed:
Apr. 12, 2011
Hamid Tavassoli, Cupertino, CA (US);
Surajit Kumar, Sunnyvale, CA (US);
Shane C. Nevil, Livermore, CA (US);
Douglas A. Buchberger, Jr., Livermore, CA (US);
Hamid Tavassoli, Cupertino, CA (US);
Surajit Kumar, Sunnyvale, CA (US);
Shane C. Nevil, Livermore, CA (US);
Douglas A. Buchberger, Jr., Livermore, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A triaxial rod assembly for providing both RF power and DC voltage to a chuck assembly that supports a workpiece in a processing chamber during a manufacturing operation. In embodiments, a rod assembly includes a center conductor to be coupled to a chuck electrode for providing DC voltage to clamp a workpiece. Concentrically surrounding the center conductor is an annular RF transmission line to be coupled to an RF powered base to provide RF power to the chuck assembly. An insulator is disposed between the center conductor and RF transmission line. Concentrically surrounding the RF transmission line is a ground plane conductor coupled to a grounded base of the chuck to provide a reference voltage relative to the DC voltage. An insulator is disposed between the RF transmission line and the ground plane conductor.