The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2014
Filed:
Jun. 04, 2008
Kim Phan Le, Eindhoven, NL;
Jozef T. M. Van Beek, Rosmalen, NL;
Kim Phan Le, Eindhoven, NL;
Jozef T. M. Van Beek, Rosmalen, NL;
NXP, B.V., Eindhoven, NL;
Abstract
A pressure/vacuum sensor and method, comprising: driving a MEMS piezoresistive resonator () into resonant vibration, applying Joule heating to the resonator (); and sensing a variable parameter that varies in response to the tendency of the resonant frequency (fo) to depend upon the temperature of the resonator (), the temperature thereof depending upon the pressure. The variable parameter may be the resonant frequency of the resonator (), or a change therein, or may be derived from a feedback loop, being for example a time integrated feedback signal () or a reading () of the sense current (), the loop keeping the resonant frequency constant in opposition to the above mentioned tendency. A reference MEMS capacitive resonator () may be located in the vicinity of the resonator () for compensating purposes.