The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Dec. 07, 2010
Yasuhiro Sawada, Tokyo, JP;
Satoru Komatsu, Utsunomiya, JP;
Yasuhiro Sawada, Tokyo, JP;
Satoru Komatsu, Utsunomiya, JP;
Canon Kabushiki Kaisha, , JP;
Abstract
An aberration measurement system includes an interferometer that includes a polarization adjuster configured to adjust a polarization plane of coherent light, and a phase shifter configured to shift a phase of reference light. The aberration measurement system further includes a signal processing unit configured to obtain a nonpolarization aberration of the test object, and coefficients a=sin ε cos 2θ, b=sin ε sin 2θ, and c=cos ε for a retardation amount 2ε and a principal axis direction θ of a polarization aberration of the test object, based on data of a plurality of interference pattern images which provide at least three complex visibilities obtained from the interferometer after a polarization adjuster adjusts the polarization plane of the coherent light, and to determine signs of the coefficients a, b, and c based on the nonpolarization aberration.