The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Jan. 04, 2011
Applicant:
Hirohito Ito, Utsunomiya, JP;
Inventor:
Hirohito Ito, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); G03B 27/62 (2006.01);
U.S. Cl.
CPC ...
Abstract
A positioning apparatus according to the present invention includes: a tabletop having a plane; a plurality of actuators configured to be driven in a direction perpendicular to the plane to move the tabletop; and a control unit configured to measure a frequency response of the tabletop and, when a peak is detected at the resonance frequency of elastic vibration of the tabletop, adjust the thrust distribution ratio for the plurality of actuators to reduce the peak.