The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Aug. 29, 2012
Applicants:
Youichi Motomura, Kitakyushu, JP;
Toshiyuki Kono, Kitakyushu, JP;
Yoshiaki Kubota, Kitakyushu, JP;
Inventors:
Assignee:
Kabushiki Kaisha Yaskawa Denki, Kitakyushu-Shi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02K 41/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
This stage apparatus includes a movable table to hold a sample, a levitation unit to operate the movable table at least in a vertical direction, and a linear motor to operate the movable table in a first horizontal direction in a horizontal plane, including a linear motor movable element arranged inside the movable table and a linear motor stator arranged inside the movable table.