The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 07, 2014

Filed:

Jun. 10, 2009
Applicants:

Valerio Pruneri, Barcelona, ES;

Luis Martinez Montblanch, Barcelona, ES;

Stefano Giurgola, Sesto Florentino, IT;

Paolo Vergani, Vimercate, IT;

Inventors:

Valerio Pruneri, Barcelona, ES;

Luis Martinez Montblanch, Barcelona, ES;

Stefano Giurgola, Sesto Florentino, IT;

Paolo Vergani, Vimercate, IT;

Assignee:

Fundacio Institut de Ciencies Fotoniques, Castelldefels, (Barcelona), ES;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0224 (2006.01); C23C 8/10 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present application discloses a method for producing a stable ultra thin metal film that comprises the following steps: a) deposition, on a substrate, of an ultra thin metal film, such as an ultra thin film of nickel, chromium, aluminum, or titanium; b) thermal treatment of the ultra thin metal film, optionally in combination with an Otreatment; and c) obtaining a protective oxide layer on top of the ultra thin metal film.


Find Patent Forward Citations

Loading…