The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Mar. 25, 2010
Don Bowman, Bonita, CA (US);
Stephen Coppola, Boston, MA (US);
Kenneth W. Cornett, Ivoryton, CT (US);
Dan Funke, San Diego, CA (US);
Julian Kamibayashiyama, San Diego, CA (US);
Jeff Navarro, Chula Vista, CA (US);
Jeremy M. Payne, New Haven, CT (US);
Donald J. Peterson, Chula Vista, CA (US);
Douglas C. Schenk, Chula Vista, CA (US);
Don Bowman, Bonita, CA (US);
Stephen Coppola, Boston, MA (US);
Kenneth W. Cornett, Ivoryton, CT (US);
Dan Funke, San Diego, CA (US);
Julian Kamibayashiyama, San Diego, CA (US);
Jeff Navarro, Chula Vista, CA (US);
Jeremy M. Payne, New Haven, CT (US);
Donald J. Peterson, Chula Vista, CA (US);
Douglas C. Schenk, Chula Vista, CA (US);
Parker-Hannifin Corporation, Cleveland, OH (US);
Abstract
A seal for sealing an interface between a container and a lid of a process chamber. The seal comprises a first seal element and a second seal element that are arranged to seal the interface in series, with the second seal element being situated to encounter processing activity upstream of the fist seal element. The first seal element has a deflectable portion and a protrusion extending radially from the deflectable portion. The second seal element has a radially extending recess in which the protrusion of the first seal element is received. The protrusion and recess interlock to restrict separation and/or rotation of the first and second seal elements. Inclined surfaces of the first seal element interact with the second seal element to apply axial sealing forces to sealing surfaces of the second seal member.