The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2013
Filed:
Mar. 31, 2010
Yi-ping Hsin, Dublin, CA (US);
Susumu Isago, Tokyo, JP;
Kazuo Masaki, Saitama, JP;
Bausan Yuan, San Jose, CA (US);
Yi-Ping Hsin, Dublin, CA (US);
Susumu Isago, Tokyo, JP;
Kazuo Masaki, Saitama, JP;
Bausan Yuan, San Jose, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
Methods and apparatus for providing vibration compensation using position measurements are disclosed. According to one aspect of the present invention, a method of compensating for vibrations of an object includes obtaining a plurality of position measurements associated with the object. The method also includes processing the plurality of position measurements to determine a derivative acceleration, and determining a compensatory force to counteract the vibrations of the object. Determining the compensatory force includes using the derivative acceleration. Finally, the method includes applying the compensatory force to the object.