The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2013
Filed:
Jul. 13, 2005
Applicants:
Ashish Bhatnagar, Fremont, CA (US);
Laxman Murugesh, San Ramon, CA (US);
Padma Gopalakrishnan, Fremont, CA (US);
Inventors:
Ashish Bhatnagar, Fremont, CA (US);
Laxman Murugesh, San Ramon, CA (US);
Padma Gopalakrishnan, Fremont, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B32B 1/08 (2006.01); C03B 29/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A substrate processing chamber component has a structural body with localized surface regions having annealed microcracks. The annealed microcracks reduce crack propagation and increase fracture resistance. In one method of manufacture, the structural body of the component is formed, and a laser beam is directed onto localized surface regions of the body for a sufficient time to anneal the surface microcracks.