The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2013
Filed:
Mar. 20, 2009
Valeriy V. Yashchuk, Richmond, CA (US);
Wayne R. Mckinney, Concord, CA (US);
Peter Z. Takacs, Riverhead, NY (US);
Valeriy V. Yashchuk, Richmond, CA (US);
Wayne R. McKinney, Concord, CA (US);
Peter Z. Takacs, Riverhead, NY (US);
The Regents of the University of California, Oakland, CA (US);
Brookhaven Science Associates, LLC, Upton, NY (US);
Abstract
The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer function (IMTF).
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile