The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
Sep. 02, 2004
Thomas J. Sonderman, Austin, TX (US);
Christopher A. Bode, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
Thomas J. Sonderman, Austin, TX (US);
Christopher A. Bode, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
A method, apparatus and a system, for performing a process control using analysis of an upstream process is provided. The method comprises performing a first process on a workpiece and performing a qualitative analysis upon the workpiece relating to the first process, the qualitative analysis comprises analyzing at least one metrology measurement relating to the first process and a workpiece feature to evaluate a characteristic of the workpiece. The method further comprises selecting a process control parameter for performing a second process upon the workpiece based upon the qualitative analysis.