The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
Mar. 15, 2011
Tsuyoshi Sato, Yokohama, JP;
Hiroyasu Kondo, Yokohama, JP;
Naoaki Sakurai, Yokohama, JP;
Katsuyuki Soeda, Yokohama, JP;
Kenichi Ooshiro, Yokohama, JP;
Shuichi Kimura, Yokohama, JP;
Tsuyoshi Sato, Yokohama, JP;
Hiroyasu Kondo, Yokohama, JP;
Naoaki Sakurai, Yokohama, JP;
Katsuyuki Soeda, Yokohama, JP;
Kenichi Ooshiro, Yokohama, JP;
Shuichi Kimura, Yokohama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
According one embodiment, a film forming apparatus includes a stage, a coating section, a vapor supply section, a blower section, and a controller. On the stage, an coating target is placed. The coating section applies a material to a predetermined region on the coating target placed on the stage to form a coating film. The vapor supply section generates solvent vapor capable of dissolving the coating film. The blower section blows the solvent vapor generated by the vapor supply section onto the coating film on the coating target placed on the stage. The controller controls an amount of the solvent vapor to be blown by the blower section so that: the coating film is dissolved; viscosity in a part of the coating film on a surface layer side is lower than that in a part thereof on the coating target side; and the viscosity in the part on the surface layer side and the viscosity of the coating target side take such values that prevent the coating film on the coating target from spreading.