The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 24, 2013

Filed:

Nov. 28, 2008
Applicants:

Hideki Hakuma, Tokyo, JP;

Yuri Yamaguchi, Tokyo, JP;

Katsuya Tabuchi, Tokyo, JP;

Katsumi Kushiya, Tokyo, JP;

Inventors:

Hideki Hakuma, Tokyo, JP;

Yuri Yamaguchi, Tokyo, JP;

Katsuya Tabuchi, Tokyo, JP;

Katsumi Kushiya, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A treatment object containing any one of Cu/Ga, Cu/In and Cu—Ga/In is held in a heated state at a temperature Tfor a time Δtin such a state that a selenium source is introduced, thereby forming a selenide. Thereafter, a sulfur source is introduced to replace the atmosphere in the system with a sulfur atmosphere. In this state, the treatment object is held in a heated state at a temperature Tfor a time Δt. The temperature of the treatment object is then decreased to T, and, at that temperature, the treatment object is held in a heated state for a time Δt.


Find Patent Forward Citations

Loading…