The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
Jul. 21, 2010
Applicants:
Richard Waters, San Diego, CA (US);
Steve Fanelli, San Diego, CA (US);
Inventors:
Richard Waters, San Diego, CA (US);
Steve Fanelli, San Diego, CA (US);
Assignee:
The United States of America as represented by the Secretary of the Navy, Washington, DC (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method is provided to create a proof mass supported by a dual-suspension system for Micro-Electro-Mechanical Systems (MEMS) using crystalline silicon. The pre-fabricated cavity method decreases the subsequent processing required to create the final mechanical structure including the proof mass and dual-suspension system. During processing, the proof mass may be connected to a support structure via tethered regions, which are removed subsequent to proof mass formation.