Humidity and temperature corrections to improve accuracy of hf ambient air monitors based on tunable diode laser ir absorption measurements

Abstract

Method of determining a total HF concentration metric in an environment including measuring an uncorrected HF concentration metric in the environment based on a first infrared absorption measurement at a wavelength corresponding to a vibrational frequency of a non-hydrogen bonded gas phase HF molecule; determining an ambient HO concentration metric in the environment available for reaction with the non-hydrogen bonded gas phase HF molecules at or about the time of obtaining the first infrared absorption measurement; calculating a HF hydrate concentration metric in the environment based on the uncorrected HF concentration metric, the ambient HO concentration metric and a reaction equilibrium relationship between the non-hydrogen bonded gas phase HF molecule and the HF hydrate; and determining the total HF concentration metric in the environment based on the uncorrected HF concentration metric and an amount of HF determined by the HF hydrate concentration metric.