The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
Oct. 24, 2011
Daniel Goodman, Lexington, MA (US);
Arthur Keigler, Wellesley, MA (US);
Freeman Fisher, Charlestown, MA (US);
David G. Guarnaccia, Carlisle, MA (US);
Daniel Goodman, Lexington, MA (US);
Arthur Keigler, Wellesley, MA (US);
Freeman Fisher, Charlestown, MA (US);
David G. Guarnaccia, Carlisle, MA (US);
Tel Nexx, Inc., Billerica, MA (US);
Abstract
A substrate chuck includes a frame forming a support adapted to support an adhering surface thereon, and a Bernoulli chuck surface coupled to the frame and adapted to support the substrate. The Bernoulli chuck surface is axially moveable relative to the support between first and second positions. In the first position, the substrate is coupled to the adhering surface, and the substrate is separated from the adhering surface with movement of the Bernoulli chuck from the first position to the second position, without contact between the substrate and the Bernoulli chuck surface.