The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
Apr. 14, 2008
Applicants:
Chang Han Je, Daejeon, KR;
Myung Lae Lee, Daejeon, KR;
Sung Hae Jung, Daegu, KR;
Gunn Hwang, Seoul, KR;
Chang Auck Choi, Daejeon, KR;
Inventors:
Chang Han Je, Daejeon, KR;
Myung Lae Lee, Daejeon, KR;
Sung Hae Jung, Daegu, KR;
Gunn Hwang, Seoul, KR;
Chang Auck Choi, Daejeon, KR;
Assignee:
Electronics and Telecommunications Research Institute, Daejeon, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus for preventing stiction of a three-dimensional MEMS (microelectromechanical system) microstructure, the apparatus including: a substrate; and a plurality of micro projections formed on a top surface of the substrate with a predetermined height in such a way that a cleaning solution flowing out from the microstructure disposed thereabove is discharged.