The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Sep. 04, 2009
Chizu Matsumoto, Fujisawa, JP;
Yuichi Hamamura, Yokohama, JP;
Yoshiyuki Tsunoda, Kanagawa, JP;
Kazuyuki Tsunokuni, Kanagawa, JP;
Chizu Matsumoto, Fujisawa, JP;
Yuichi Hamamura, Yokohama, JP;
Yoshiyuki Tsunoda, Kanagawa, JP;
Kazuyuki Tsunokuni, Kanagawa, JP;
Renesas Electronics Corporation, Kanagawa, JP;
Abstract
In a managing system for a semiconductor manufacturing apparatus, a predicting unitpredicts a characteristic defective ratio and a foreign-substance defective ratio of each process obtains an actual defective ratio of each fail bit mode and a critical area of each process and each fail bit mode, calculates the number of foreign substances of each process by using the actual defective ratio of each fail bit mode and the critical area of each process and each fail bit mode, the fail bit mode being except for an arbitrary fail bit mode, calculates a foreign-substance defective ratio of each process and a foreign-substance defective ratio of each fail bit mode by using the number of foreign substances, and calculates a characteristic defective ratio of the arbitrary fail bit mode based on the foreign-substance defective ratio and actual defective ratio of each fail bit mode.