The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Sep. 29, 2011
Kunihiro Kuwano, Kawasaki, JP;
Kunihiro Kuwano, Kawasaki, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A piezoelectric actuator includes a first piezoelectric element that performs thickness-shear vibration in a first direction, a first member that is driven by the first piezoelectric element and that vibrates in the first direction, a second piezoelectric element that is supported by the first member and that performs thickness-shear vibration in a second direction, a second member that is driven by the second piezoelectric element and that vibrates in the second direction, a pressurizing section that generates a pressure between the second member and a driving target member driven by the second member. The pressurizing section includes a third piezoelectric element that changes the pressure between the second member and a driving target member on the basis of a driving state of the driving target member.