The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Jul. 27, 2011
Applicants:
Narendra V. Lakamraju, Tempe, AZ (US);
Sameer M. Venugopal, Chandler, AZ (US);
Stephen M. Phillips, Gilbert, AZ (US);
David R. Allee, Phoenix, AZ (US);
Inventors:
Narendra V. Lakamraju, Tempe, AZ (US);
Sameer M. Venugopal, Chandler, AZ (US);
Stephen M. Phillips, Gilbert, AZ (US);
David R. Allee, Phoenix, AZ (US);
Assignee:
Arizona Board of Regents, Scottsdale, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/20 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
Embodiments of embedded MEMS sensors and related methods are described herein. Other embodiments and related methods are also disclosed herein.