The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Apr. 18, 2011
Yizhen Lin, Gilbert, AZ (US);
Gary G. LI, Chandler, AZ (US);
Andrew C. Mcneil, Chandler, AZ (US);
Todd F. Miller, Mechanicville, NY (US);
Lisa Z. Zhang, Chandler, AZ (US);
Yizhen Lin, Gilbert, AZ (US);
Gary G. Li, Chandler, AZ (US);
Andrew C. McNeil, Chandler, AZ (US);
Todd F. Miller, Mechanicville, NY (US);
Lisa Z. Zhang, Chandler, AZ (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A MEMS device () includes a proof mass () coupled to and surrounding an immovable structure (). The immovable structure () includes fixed fingers () extending outwardly from a body () of the structure (). The proof mass () includes movable fingers (), each of which is disposed between a pair () of the fixed fingers (). A central area () of the body () is coupled to an underlying substrate (), with the remainder of the immovable structure () and the proof mass () being suspended above the substrate () to largely isolate the MEMS device () from package stress, Additionally, the MEMS device () includes isolation trenches () and interconnects () so that the fixed fingers (), the fixed fingers (), and the movable fingers () are electrically isolated from one another to yield a differential device configuration.