The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Dec. 26, 2007
Applicants:
Myung-ok Kim, Kyoungki-do, KR;
Tae-woo Jung, Kyoungki-do, KR;
Inventors:
Myung-Ok Kim, Kyoungki-do, KR;
Tae-Woo Jung, Kyoungki-do, KR;
Assignee:
Hynix Semiconductor Inc., , KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for fabricating a semiconductor device includes providing a substrate having a first and a second region, forming an etch target layer over the substrate, forming a hard mask layer over the etch target layer to have different thicknesses over the first and the second regions, forming a hard mask pattern by etching the hard mask layer, and etching the etch target layer using the hard mask pattern as an etch mask to form a target pattern having different densities over the first and the second regions.