The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Aug. 29, 2011
Applicants:
Takashi Shirono, Tokyo, JP;
Kazumasa Tanida, Oita, JP;
Naoko Yamaguchi, Kanagawa, JP;
Satoshi Hongo, Oita, JP;
Tsuyoshi Matsumura, Oita, JP;
Inventors:
Takashi Shirono, Tokyo, JP;
Kazumasa Tanida, Oita, JP;
Naoko Yamaguchi, Kanagawa, JP;
Satoshi Hongo, Oita, JP;
Tsuyoshi Matsumura, Oita, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/46 (2006.01);
U.S. Cl.
CPC ...
Abstract
According to one embodiment, an insulation film is formed over the surface, backside, and sides of a first substrate. Next, the insulation film formed over the surface of the first substrate is removed. Then, a joining layer is formed over the surface of the first substrate, from which the insulation film has been removed. Subsequently, the first substrate is bonded to a second substrate via a joining layer.