The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Jan. 19, 2010
Yuichi Yamazaki, Tokyo, JP;
Tadashi Sakai, Kanagawa, JP;
Naoshi Sakuma, Kanagawa, JP;
Masayuki Katagiri, Kanagawa, JP;
Mariko Suzuki, Kanagawa, JP;
Shintaro Sato, Tokyo, JP;
Yuichi Yamazaki, Tokyo, JP;
Tadashi Sakai, Kanagawa, JP;
Naoshi Sakuma, Kanagawa, JP;
Masayuki Katagiri, Kanagawa, JP;
Mariko Suzuki, Kanagawa, JP;
Shintaro Sato, Tokyo, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
In the growth of carbon nanotubes, the aggregation of catalytic fine particles therefor is a problem. In order to realize the growth of carbon nanotubes into a high density, the carbon nanotube growing process includes a first plasma treatment step of treating a surface having catalytic fine particles with a plasma species generated from a gas which contains at least hydrogen or a rare gas without carbon element, a second plasma treatment step of forming a carbon layer on the surface of the catalytic fine particles by a plasma generated from a gas which contains at least a hydrocarbon after the first plasma treatment step, and a carbon nanotube growing step of growing carbon nanotubes by use of a plasma generated from a gas which contains at least a hydrocarbon after the second plasma treatment step.