The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 2013

Filed:

Mar. 02, 2009
Applicants:

Kenji Shibata, Kariya, JP;

Toshihisa Shimo, Kariya, JP;

Kyoko Kumagai, Kariya, JP;

Hidetaka Hayashi, Kariya, JP;

Shinya Okuda, Kariya, JP;

Shinfuku Nomura, Matsuyama, JP;

Hiromichi Toyota, Matsuyama, JP;

Inventors:

Kenji Shibata, Kariya, JP;

Toshihisa Shimo, Kariya, JP;

Kyoko Kumagai, Kariya, JP;

Hidetaka Hayashi, Kariya, JP;

Shinya Okuda, Kariya, JP;

Shinfuku Nomura, Matsuyama, JP;

Hiromichi Toyota, Matsuyama, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract

In an in-liquid plasma film-forming apparatus having: a vesselbeing capable of accommodating a substrate 'S' and a liquid 'L' including raw material therein; an electrodefor in-liquid plasma, electrodewhich is disposed in the vessel; an electric power devicefor supplying electricity to the electrodefor in-liquid plasma; the electrodefor in-liquid plasma is equipped with: a main electrodehaving a discharging end; an auxiliary electrodenot only facing the discharging endbut also being disposed between the discharging endand the substrate “S” that face each other; and a plasma generating unithaving a space that is demarcated by a surfaceof the discharging endand a surfaceof the auxiliary electrodefacing the surface, and being for generating plasma by means of electricity being supplied to the main electrode


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