The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 2013

Filed:

Mar. 30, 2011
Applicant:

Takeshi Ohsato, Saitama, JP;

Inventor:

Takeshi Ohsato, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/22 (2006.01);
U.S. Cl.
CPC ...
Abstract

A force sensor chip of the present invention is for detecting an external force, and comprises a base member including an action portion where the external force is applied, a support portion that supports the action portion therearound, and a connecting portion that connects the action portion and the support portion together, a plurality of strain detecting resistive elements that are formed at respective deformation producing portions of the base member which deform when the external force is applied, and a thin-film resistor that is formed at upper layers of the strain detecting resistive elements with a resistive-element wiring and an interlayer insulation film intervening between the thin-film resistor and the strain detecting resistive elements.


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