The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Dec. 13, 2011
Applicants:
Won Kyu Jeung, Seoul, KR;
Jong Woon Kim, Seoul, KR;
Heung Woo Park, Gyunggi-do, KR;
Inventors:
Assignee:
Samsung Electro-Mechanics Co., Ltd., Gyunggi-Do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/16 (2006.01); H01L 29/84 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed herein is a MEMS component. The MEMS component according to the exemplary embodiment of the present invention includes: a plate-shaped membrane; a postdisposed under an edgeof the membrane; a stopperdisposed under the membraneand disposed more inwardly than the postso as to form a spacebetween the stopperand the post; and a capdisposed under the postso as to cover the post, whereby the influence of disturbance or noise occurring from external environments or interference from surrounding sensors can be interrupted by using a predetermined regionof the membranedisposed above the space