The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2013
Filed:
Jun. 28, 2013
Applicant:
Taiwan Mask Corporation, Hsinchu, TW;
Inventor:
Ming-Chih Chen, Hsinchu, TW;
Assignee:
Taiwan Mask Corporation, Hsinchu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01H 31/12 (2006.01); G01N 27/00 (2006.01); G01R 31/26 (2006.01); G01V 8/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for testing a mask article includes steps of electrically connecting the mask article to an electrical sensor, applying a bias voltage to a plurality of testing sites of the mask article with a conductor, measuring at least one current distribution of the testing sites with the electrical sensor, and determining the quality of the mask article by taking the at least one current distribution into consideration.