The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2013

Filed:

Jun. 01, 2009
Applicants:

Rashed Mahameed, Umm Al-Fahem, IL;

Nipun Sinha, Philadelphia, PA (US);

Gianluca Piazza, Philadelphia, PA (US);

Inventors:

Rashed Mahameed, Umm Al-Fahem, IL;

Nipun Sinha, Philadelphia, PA (US);

Gianluca Piazza, Philadelphia, PA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
Abstract

Piezoelectric switches and methods of forming piezoelectric switches. The piezoelectric switch includes first and second cantilever beam actuators. The second cantilever beam actuator has a projection that overlaps the first cantilever beam actuator in a contact region. The projection is mechanically separated from the first cantilever beam actuator by a nanogap such that the first and second cantilever beam actuators are electrically isolated from each other. Each of the first and second cantilever beam actuators includes a piezoelectric actuation layer.


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