The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2013
Filed:
Jul. 25, 2011
Applicants:
Arnold Allenic, Arbor, MI (US);
Stephan Paul George, Ii, Perrysburg, OH (US);
Sreenivas Jayaraman, Holland, OH (US);
Oleh Karpenko, Perrysburg, OH (US);
Chong Lim, Perrysburg, OH (US);
Inventors:
Arnold Allenic, Arbor, MI (US);
Stephan Paul George, II, Perrysburg, OH (US);
Sreenivas Jayaraman, Holland, OH (US);
Oleh Karpenko, Perrysburg, OH (US);
Chong Lim, Perrysburg, OH (US);
Assignee:
First Solar, Inc., Perrysburg, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A metrology system for gauging and spatially mapping a semiconductor material on a substrate can be used in controlling deposition and thermal activation processes.