The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2013
Filed:
Oct. 18, 2007
Jong Sun Kim, Seongnam-si, KR;
Chang Keun Lee, Seoul, KR;
Won Ki Jeong, Seongnam-si, KR;
LG Electronics Inc., Seoul, KR;
Abstract
A lift pin driving device and a manufacturing apparatus having the device are provided. The device includes drive unit including a single drive motor that drives a pin plate, a plurality of timing belts and a plurality of pulleys. The pin plate, which supports a plurality of lift pins thereon, is moved by the pulleys, operated in conjunction with the motor through the timing belts. A tensioner controls a tension of the timing belts. The tensioner may be controlled to provide precise rectilinear movement without leaning, and to prevent the timing belts from sagging. The device efficiently controls the tension of the timing belts and allows the lift pins to be precisely moved upwards or downwards such that a substrate positioned thereon may maintain a horizontal position while being moved upwards or downwards.