The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2013
Filed:
Oct. 23, 2007
Applicants:
Peter Van Der Meulen, Newburyport, MA (US);
Christopher C Kiley, Carlisle, MA (US);
Patrick D. Pannese, Lynnfield, MA (US);
Inventors:
Peter van der Meulen, Newburyport, MA (US);
Christopher C Kiley, Carlisle, MA (US);
Patrick D. Pannese, Lynnfield, MA (US);
Assignee:
Brooks Automation, Inc., Chelmsford, MA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B65G 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method is provided where the method includes configuring a plurality of robots so that a wafer can be handed off between neighboring robots, and disposing a plurality of sensors so that a robotic arm-relative position of a wafer that is transported by a robot is determined from sensor outputs by moving the wafer through a retract, rotate, and extend path.