The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2013
Filed:
Nov. 28, 2011
Takahiro Yamada, Hitachi, JP;
Fumiaki Noda, Hitachi, JP;
Takahiro Yamada, Hitachi, JP;
Fumiaki Noda, Hitachi, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
To provide a magnetic field control apparatus capable of reducing a width of a correcting plate. The magnetic field control apparatus includes a conductive vacuum ductdisposed between dipole magnet magnetic polesand a conductive correcting plate. The correcting plateis formed of a material having an electric conductivity higher than that of the vacuum duct. A plurality of conductive correcting platesare disposed in each of four areas, the four areas being formed by dividing a cross section of a vacuum ductextending perpendicularly to a direction in which a charged particle beam travels by a symmetrical surface having each of both magnetic poles of the dipole magnet defined as a mirror image and a plane which extends perpendicularly to the symmetrical surface and through which a center of gravity of the charged particle beam passes.