The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2013
Filed:
Sep. 23, 2011
Jae-kwang Choi, Suwon-si, KR;
Hong-jin Kim, Seoul, KR;
Keon-sik Seo, Suwon-si, KR;
Sol Han, Gyeonggi-do, KR;
Kun-tack Lee, Suwon-si, KR;
Byoung-ho Kwon, Hwaseong-si, KR;
Jae-Kwang Choi, Suwon-si, KR;
Hong-Jin Kim, Seoul, KR;
Keon-Sik Seo, Suwon-si, KR;
Sol Han, Gyeonggi-do, KR;
Kun-Tack Lee, Suwon-si, KR;
Byoung-Ho Kwon, Hwaseong-si, KR;
Samsung Electronics Co., Ltd., Suwon-Si, KR;
Abstract
A pad conditioning disk, a pre-conditioning unit, and a CMP apparatus having the same are provided. The pad conditioning disk includes a base in which mountain-type tips and valley-type grooves are repeatedly connected to each other, and a cutting layer formed on the base layer. The cutting layer including conditioning particles deposited on surfaces of the tips and grooves. A surfaces roughness of conditioning particles deposited on the surfaces of the tips is less than a surface roughness of conditioning particles deposited on the surfaces of the grooves.