The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 03, 2013

Filed:

Mar. 02, 2011
Applicants:

Mitsuo Natsume, Ise, JP;

Mitsutoshi Ochiai, Ise, JP;

Takumi Mizokawa, Ise, JP;

Inventors:

Mitsuo Natsume, Ise, JP;

Mitsutoshi Ochiai, Ise, JP;

Takumi Mizokawa, Ise, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B65B 1/04 (2006.01); B65B 31/04 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67775 (2013.01); Y10S 414/135 (2013.01); Y10S 414/137 (2013.01); Y10S 414/139 (2013.01);
Abstract

Disclosed herein is an apparatus including: a table configured to receive a container that stores an object therein, the container including a bottom surface provided with a positioning groove and including a charging inlet through which a gas is charged into the container; a positioning pin projecting from the table and adapted to engage with the positioning groove of the container; a nozzle configured to charge the gas into the container through the charging inlet; and a drive unit configured to move the nozzle into contact with the charging inlet of the container after the positioning pin is engaged with the positioning groove.


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