The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2013
Filed:
Apr. 12, 2011
Applicants:
Koji Kitahara, Ina, JP;
Akira Sano, Shiojiri, JP;
Inventors:
Koji Kitahara, Ina, JP;
Akira Sano, Shiojiri, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/00 (2006.01); H01S 4/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing a variable wavelength interference filter includes forming an electrostatic gap forming groove, a wiring forming groove extending from the electrostatic gap forming groove to an outer peripheral edge of the chip region, and an air communication groove through which the wiring groove forming groove communicates with the outside of the first substrate, in a chip region of a first substrate.