The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 26, 2013

Filed:

Jan. 21, 2010
Applicants:

Yusuke Kusaka, Osaka, JP;

Yohei Takechi, Osaka, JP;

Atsushi Fukui, Osaka, JP;

Seiji Hamano, Hyogo, JP;

Kazumasa Takata, Osaka, JP;

Inventors:

Yusuke Kusaka, Osaka, JP;

Yohei Takechi, Osaka, JP;

Atsushi Fukui, Osaka, JP;

Seiji Hamano, Hyogo, JP;

Kazumasa Takata, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/41 (2006.01);
U.S. Cl.
CPC ...
Abstract

By using two probe optical systems for measurement by disposing the probe optical systems with a test object sandwiched therebetween, an optical path length of light transmitted through the test object which is identified locally is calculated using an interference signal thereof. In addition, a geometrical thickness of the same part is calculated by measuring positions of the probe optical systems, whereby two calculated values are obtained. Based on the values and a calculated value for a reference object, a refractive index distribution of the test object is obtained.


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