The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 26, 2013

Filed:

Nov. 05, 2012
Applicant:

Renesas Electronics Corporation, Kawasaki, JP;

Inventors:

Yoshimitsu Murase, Kawasaki, JP;

Kenya Kobayashi, Kawasaki, JP;

Atsushi Kaneko, Kawasaki, JP;

Hideo Yamamoto, Kawasaki, JP;

Assignee:

Renesas Electronics Corporation, Kawasaki-shi, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor device includes a semiconductor layer of a second conductive type, a first diffused region of a first conductive type formed in the semiconductor layer, a second diffused region of the second conductive type selectively formed in the first diffused region, a trench formed in the semiconductor layer, a gate electrode housed in the trench with a gate insulator intervening, a top surface of the gate electrode being lower than a top surface of the second diffused region, a first oxide film housed in the trench and formed over the gate electrode, a second oxide film housed in the trench and formed over the first oxide film, a third oxide film housed in the trench and formed over the second oxide film, and a source electrode formed over the third oxide film and electrically connecting to the first and second diffused regions.


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