Device for analyzing charge and ultraviolet (uv) light

Abstract

Provided is a device for analyzing at least one of a generated amount of positive charges, a generated amount of negative charges, and a generated amount of ultraviolet (UV) light. The device includes a substrate on which at least one of a first device configured to detect a variation in threshold voltage relative to the generated amount of positive charges, a second device configured to detect a variation in threshold voltage relative to the generated amount of negative charges, and a third device configured to detect a variation in threshold voltage relative to the generated amount of UV light is formed. Each of the first through third devices includes a first isolation region disposed in the substrate which define first and third active regions each of a first conductivity type and second and fourth active regions each of a second conductivity type different from the first conductivity type, first impurity regions disposed in the first active region and spaced apart from each other and having the second conductivity type, a floating gate crossing over the first active region between the first impurity regions and extending over the second active region, a second impurity region disposed in the second active region and having the first conductivity type, and a conductive structure electrically connected to the second impurity region.