The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2013
Filed:
Feb. 25, 2013
Plex Llc, Fall River, MA (US);
Malcolm W. McGeoch, Little Compton, RI (US);
Plex LLC, Fall River, MA (US);
Abstract
A plasma pinch extreme ultraviolet source using lithium vapor requires surrounding surfaces that are heated or cooled in order to evaporate the desired quantity of lithium, typically setting the vapor pressure of lithium at a pressure of a few torr. Two distinct surfaces within the whole set are designated as the electrodes that emit and receive the high current of the plasma pinch. A method is described whereby the temperature of these designated electrode surfaces is manipulated in order to condense lithium and provide a liquid metal protective layer to absorb both plasma and extreme ultraviolet heat thereby controlling electrode erosion. A further method is described that provides a protective flow of liquid lithium exactly on the axis of the pair of discharge electrodes.