The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2013
Filed:
Mar. 15, 2011
Byung-koog Ra, Yongin-si, KR;
Tae-sik Yun, Seoul, KR;
Kunhyung Lee, Hwaseong-si, KR;
Hyunjoon Kim, Seoul, KR;
Hyeogki Kim, Hwaseong-si, KR;
Kidoo Kim, Osan-si, KR;
Byung-Koog Ra, Yongin-si, KR;
Tae-Sik Yun, Seoul, KR;
Kunhyung Lee, Hwaseong-si, KR;
Hyunjoon Kim, Seoul, KR;
Hyeogki Kim, Hwaseong-si, KR;
KiDoo Kim, Osan-si, KR;
Abstract
A substrate transfer container comprises a housing including a plurality of substrate slots positioned within a gas chamber having an interior environment. Each substrate slot accommodates a substrate undergoing a substrate manufacturing process, the interior environment of the gas chamber being selectively sealed from an exterior environment. A detection unit at the housing is constructed and arranged to detect an environmental property of the interior environment of the gas chamber, and to generate a detection signal in response. A signal transmission module at the housing is configured to wirelessly transmit a detection signal received from the detection unit.