The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2013
Filed:
Mar. 25, 2009
Applicants:
Wolfgang Reinert, Neumuenster, DE;
Martin Heller, Itzehoe, DE;
Inventors:
Wolfgang Reinert, Neumuenster, DE;
Martin Heller, Itzehoe, DE;
Assignees:
Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung e.V., Munich, DE;
Maxim Integrated GmbH, Lebring, AT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 1/02 (2006.01); G01P 15/125 (2006.01); G01C 19/56 (2012.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to an inertial sensor, preferably an acceleration sensor or multi-axis acceleration sensor as a microelectromechanical construction element, said sensor comprising a housing with at least one first gas-filled cavity in which a first detection unit is disposed moveably relative to the housing for detection of an acceleration to be detected, wherein the inertial sensor comprises a damping structure.