The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2013
Filed:
Jun. 11, 2007
Carl O. Bozler, Waltham, MA (US);
Jeremy Muldavin, Chelmsford, MA (US);
Peter W. Wyatt, Lincoln, MA (US);
Craig L. Keast, Groton, MA (US);
Steven Rabe, West Roxbury, MA (US);
Carl O. Bozler, Waltham, MA (US);
Jeremy Muldavin, Chelmsford, MA (US);
Peter W. Wyatt, Lincoln, MA (US);
Craig L. Keast, Groton, MA (US);
Steven Rabe, West Roxbury, MA (US);
Massachusetts Institute of Technology, Cambridge, MA (US);
Abstract
A device includes a device wafer having a circuit component formed thereon and having vias formed therein and a cap wafer bonded to the device wafer. The cap wafer has a cavity therein. The cavity has a post formed therein, and the post is positioned to mechanically support the vias formed in the device wafer. The cavity has a volume, the volume substantially enclosing the circuit component formed on the device wafer. The cavity has a width and height such that an impedance of a transmission line is dependent upon the width and height of the cavity, or the impedance of a transmission line is dependent upon the width of a center conductor within the cavity.