The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 19, 2013

Filed:

Jun. 22, 2011
Applicants:

Yuehu Pu, Chiyoda, JP;

Hisashi Harada, Chiyoda, JP;

Taizo Honda, Chiyoda, JP;

Inventors:

Yuehu Pu, Chiyoda, JP;

Hisashi Harada, Chiyoda, JP;

Taizo Honda, Chiyoda, JP;

Assignee:

Mitsubishi Electric Corporation, Chiyoda-Ku, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

A particle beam irradiation apparatus comprises a particle beam shielding member which shields a part of a particle beam which is scanned, a prompt signal detector which detects a prompt signal which is generated when the particle beam which is scanned collides with the particle beam shielding member and a signal comparison device which predicts and obtains a generation pattern of a prompt signal which is generated with a predetermined scanning pattern and stores as a signal time pattern for comparison, wherein the signal comparison device detects an abnormality of scanning of a particle beam or the particle beam shielding member by comparing a detected signal time pattern which is a time pattern of a signal which is detected by the prompt signal detector to a signal time pattern for comparison which is stored.


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