The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2013
Filed:
Jan. 20, 2012
Taizo Honda, Chiyoda-ku, JP;
Hisashi Harada, Chiyoda-ku, JP;
Yuehu Pu, Chiyoda-ku, JP;
Masahiro Ikeda, Chiyoda-ku, JP;
Kazushi Hanakawa, Chiyoda-ku, JP;
Toshihiro Otani, Chiyoda-ku, JP;
Tadashi Katayose, Chiyoda-ku, JP;
Yukiko Yamada, Chiyoda-ku, JP;
Taizo Honda, Chiyoda-ku, JP;
Hisashi Harada, Chiyoda-ku, JP;
Yuehu Pu, Chiyoda-ku, JP;
Masahiro Ikeda, Chiyoda-ku, JP;
Kazushi Hanakawa, Chiyoda-ku, JP;
Toshihiro Otani, Chiyoda-ku, JP;
Tadashi Katayose, Chiyoda-ku, JP;
Yukiko Yamada, Chiyoda-ku, JP;
Mitsubishi Electric Corporation, Chiyoda-Ku, Tokyo, JP;
Abstract
A charged particle beam position monitor is provided with a plurality of position monitors and a beam data processing device that performs calculation processing of the state of a charged particle beam, based on a plurality of signals outputted from the position monitors. The beam data processing device includes a plurality of channel data conversion units that perform AD conversion processing of the plurality of signals outputted from the position monitors; a position size processing unit, for each of the position monitors, that calculates the beam position of the beam, based on voltage information obtained through the AD conversion processing; and an integrated control unit that controls the plurality of channel data conversion units in such a way that while the beam is irradiated onto an irradiation subject, AD conversion processing of the signals is performed at different timings for the respective position monitors.