The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2013
Filed:
Mar. 12, 2008
Bruce E. Adams, Portland, OR (US);
Dean Jennings, Beverly, MA (US);
Aaron Muir Hunter, Santa Cruz, CA (US);
Abhilash J. Mayur, Salinas, CA (US);
Vijay Parihar, Fremont, CA (US);
Bruce E. Adams, Portland, OR (US);
Dean Jennings, Beverly, MA (US);
Aaron Muir Hunter, Santa Cruz, CA (US);
Abhilash J. Mayur, Salinas, CA (US);
Vijay Parihar, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A system for thermal processing of a substrate includes a source of radiation, optics disposed between the source and the substrate to receive light from the source of radiation at the optics proximate end, and a housing holding the optics and having a void inside the housing isolated from light emitted from the source. A light detector is disposed within the void in the housing to detect light from the optics emitted into the housing and send a deterioration signal. The system further includes a power supply for the source of radiation, and a controller to control the power supply based on the deterioration signal from the light detector.