The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2013
Filed:
Mar. 07, 2013
Chunghwa Picture Tubes, Ltd., Taoyuan, TW;
Der-Chun Wu, New Taipei, TW;
Chunghwa Picture Tubes, Ltd., Taoyuan, TW;
Abstract
A method for forming an oxide thin film transistor is provided. A gate electrode, a semiconductor insulation layer and a metal oxide layer is sequentially disposed on a substrate. A first patterned photo-resist layer is disposed on the metal oxide layer using a gray-level mask. The first patterned photo-resist layer is used as a mask to etch the metal oxide layer to form a patterned metal oxide layer. A part of the first patterned photo-resist layer is removed to form a second patterned photo-resist layer. A metal layer is formed and a third patterned photo-resist layer is used as a mask to etch the metal layer to form a source region and a drain region and to expose the second patterned photo-resist layer. The third patterned photo-resist layer and a part of second patterned photo-resist layer are removed to form a fourth patterned photo-resist layer.