The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 19, 2013

Filed:

Jun. 13, 2008
Applicants:

Sushil Kumar, New Delhi, IN;

Prakash Narain Dixit, New Delhi, IN;

Chandra Mohan Singh Rauthan, New Delhi, IN;

Inventors:

Sushil Kumar, New Delhi, IN;

Prakash Narain Dixit, New Delhi, IN;

Chandra Mohan Singh Rauthan, New Delhi, IN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/24 (2006.01);
U.S. Cl.
CPC ...
Abstract

A process for the preparation of nano structured silicon thin film using radio frequency (rf) plasma discharge useful for light emitting devices such as light emitting diode, laser etc. which allows precise control of the nanocrystal size of silicon and its uniform distribution without doping using a plasma processing for obtaining efficient photoluminescence at room temperature.


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