The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2013
Filed:
Jun. 30, 2008
Arnold Kholodenko, San Francisco, CA (US);
Cheng-yu Lin, Sunnyvale, CA (US);
Leon Ginzburg, Santa Clara, CA (US);
Mark Mandelboym, Santa Clara, CA (US);
Gregory A. Tomasch, Kelseyville, CA (US);
Anwar Husain, Pleasanton, CA (US);
Arnold Kholodenko, San Francisco, CA (US);
Cheng-yu Lin, Sunnyvale, CA (US);
Leon Ginzburg, Santa Clara, CA (US);
Mark Mandelboym, Santa Clara, CA (US);
Gregory A. Tomasch, Kelseyville, CA (US);
Anwar Husain, Pleasanton, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A head for dispensing a thin film over a substrate is disclosed. The head includes a body assembly that extends between a first and a second end that is at least a width of the substrate. The body includes a main bore that is defined between the first and the second ends, the main bore connected to an upper side of a reservoir through a plurality of feeds that are defined between the main bore and the reservoir. The body also includes a plurality of outlets connected to a lower side of the reservoir and extend to an output slot. The plurality of feeds have a larger cross-sectional area than the plurality of outlets and the plurality of feeds are fewer than the plurality of outlets. Wherein fluid is configured to flow through the main bore, through the plurality of feeds along the bore and fill the reservoir up to at least the threshold level before fluid is evenly output as a film out of the output slot onto the substrate.